Invention Grant
- Patent Title: Electron microscope
- Patent Title (中): 电子显微镜
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Application No.: US13145955Application Date: 2010-01-19
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Publication No.: US08947520B2Publication Date: 2015-02-03
- Inventor: Yoshinobu Hoshino , Shigeru Kawamata
- Applicant: Yoshinobu Hoshino , Shigeru Kawamata
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2009-011986 20090122
- International Application: PCT/JP2010/050569 WO 20100119
- International Announcement: WO2010/084860 WO 20100729
- Main IPC: H04N9/47
- IPC: H04N9/47 ; H04N7/18 ; H01J37/26 ; H01J37/244

Abstract:
An electron microscope according to the present invention includes: a backscattered electron detector provided with a backscattered electron detecting element (9); a low-vacuum secondary electron detector provided with a bias electrode (11) and a specimen stage (12); and a signal switch (14) that switches signals detected by the detectors. Optimal observation conditions are stored in an observation condition memory (20) for each of the detectors. A CPU (19) calls observation conditions stored in the observation condition memory (20) on the basis of the switching of the detectors, and sets conditions of the electron microscope to the called observation conditions. An image processing device (22) converts a plurality of the detected signals obtained on the basis of the switching of the detectors into two-dimensional image signals and evaluates the qualities of images of the two-dimensional image signals. In an image quality prioritized mode, the CPU (19) selects a detector causing an evaluated value to be highest on the basis of the results of the evaluation performed by the image processing device (22) and causes an image to be displayed. In the electron microscope that includes the plurality of detectors, a detector can easily be selected, and the optimal observation conditions for the detectors can easily be set.
Public/Granted literature
- US20120019648A1 ELECTRON MICROSCOPE Public/Granted day:2012-01-26
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