Invention Grant
- Patent Title: Chemical-mechanical polishing pad and chemical-mechanical polishing method
- Patent Title (中): 化学机械抛光垫和化学机械抛光方法
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Application No.: US13809694Application Date: 2011-06-13
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Publication No.: US08944888B2Publication Date: 2015-02-03
- Inventor: Kotaro Kubo , Yukio Hosaka , Takahiro Okamoto
- Applicant: Kotaro Kubo , Yukio Hosaka , Takahiro Okamoto
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-157559 20100712; JP2010-157560 20100712; JP2010-175900 20100805
- International Application: PCT/JP2011/063500 WO 20110613
- International Announcement: WO2012/008252 WO 20120119
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B37/26 ; B24B37/24 ; H01L21/3105 ; H01L21/321

Abstract:
A chemical mechanical polishing pad includes a polishing layer, a recess being formed in a polishing surface of the polishing layer, the polishing layer including a surface layer that forms at least an inner side of the recess, and a ratio (D1/D2) of an average opening ratio D1(%) to an average opening ratio D2(%) being 0.01 to 0.5, the average opening ratio D1 being an average opening ratio of the inner side of the recess when the polishing layer has been immersed in water at 23° C. for 1 hour, and the average opening ratio D2 being an average opening ratio of a cross section of the polishing layer that does not intersect the surface layer when the cross section has been immersed in water at 23° C. for 1 hour.
Public/Granted literature
- US20130189907A1 CHEMICAL-MECHANICAL POLISHING PAD AND CHEMICAL-MECHANICAL POLISHING METHOD Public/Granted day:2013-07-25
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