Invention Grant
US08943883B2 Apparatus for counting microparticles using a gas reservoir to increase stability of air pressure
有权
用于使用气体储存器计数微粒以增加空气压力的稳定性的装置
- Patent Title: Apparatus for counting microparticles using a gas reservoir to increase stability of air pressure
- Patent Title (中): 用于使用气体储存器计数微粒以增加空气压力的稳定性的装置
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Application No.: US13617456Application Date: 2012-09-14
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Publication No.: US08943883B2Publication Date: 2015-02-03
- Inventor: Masakazu Okamura
- Applicant: Masakazu Okamura
- Applicant Address: NL Amsterdam
- Assignee: HGST Netherlands B.V.
- Current Assignee: HGST Netherlands B.V.
- Current Assignee Address: NL Amsterdam
- Main IPC: G01M9/00
- IPC: G01M9/00
Abstract:
A microparticle count apparatus that includes or is connected to a gas reservoir for increasing stability of air pressure at the microparticle counter even when air pressure or air flow rate provided by a nozzle coupled to the microparticle measurement apparatus is unstable.
Public/Granted literature
- US20140076025A1 APPARATUS FOR COUNTING MICROPARTICLES USING A GAS RESERVOIR TO INCREASE STABILITY OF AIR PRESSURE Public/Granted day:2014-03-20
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