Invention Grant
- Patent Title: Optical modulator formed on bulk-silicon substrate
- Patent Title (中): 在体硅衬底上形成的光调制器
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Application No.: US13012036Application Date: 2011-01-24
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Publication No.: US08842942B2Publication Date: 2014-09-23
- Inventor: Dong-jae Shin , Kyoung-won Na , Sung-dong Suh , Kyoung-ho Ha , Seong-gu Kim , Ho-chul Ji , In-sung Joe , Jin-kwon Bok , Pil-kyu Kang
- Applicant: Dong-jae Shin , Kyoung-won Na , Sung-dong Suh , Kyoung-ho Ha , Seong-gu Kim , Ho-chul Ji , In-sung Joe , Jin-kwon Bok , Pil-kyu Kang
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2010-0011471 20100208; KR10-2010-0011472 20100208
- Main IPC: G02B6/42
- IPC: G02B6/42
Abstract:
An optical modulator comprises a bulk-silicon substrate comprising a trench having a predetermined width and a predetermined depth. A bottom cladding layer is formed in the trench, and a plurality of waveguides and a phase modulation unit are formed on the bottom cladding layer. A top cladding layer is formed on the plurality of waveguides and the phase modulation unit.
Public/Granted literature
- US20110194803A1 OPTICAL MODULATOR FORMED ON BULK-SILICON SUBSTRATE Public/Granted day:2011-08-11
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