Invention Grant
- Patent Title: Microstructure and method of manufacturing the same
- Patent Title (中): 微结构及其制造方法
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Application No.: US13047670Application Date: 2011-03-14
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Publication No.: US08842353B2Publication Date: 2014-09-23
- Inventor: Takahisa Kato
- Applicant: Takahisa Kato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2010-058726 20100316
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B81B3/00

Abstract:
A microstructure includes a substrate, a fixed supporting portion fixed to the substrate, a first movable portion, a second movable portion enhancing the rigidity of the first movable portion, and an elastic supporting portion elastically interconnecting the first movable portion and the fixed supporting portion. The second movable portion is secured to the first movable portion with a gap interposed therebetween and in such a manner as to cover the elastic supporting portion and the fixed supporting portion. The first movable portion and the second movable portion are elastically supported by the elastic supporting portion in such a manner as to be displaceable together relative to the fixed supporting portion.
Public/Granted literature
- US20110228372A1 MICROSTRUCTURE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-09-22
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