A laser induced thermal imaging (LITI) apparatus and a method of manufacturing an organic light emitting diode (OLED) display device using the LITI apparatus. The method of manufacturing the OLED display device using the LITI apparatus includes arranging an acceptor substrate on a substrate stage; forming a donor film on the acceptor substrate; disposing a patterned mask above the acceptor substrate; irradiating the donor film with a laser beam generated by a laser beam generator through an opening of the mask; and transferring a pattern of the donor film onto the acceptor substrate. The LITI apparatus and the manufacturing method allow a transfer layer of a donor film to be easily transferred onto a substrate by scanning a laser beam without regard to a size of the substrate.