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US08829767B2 Large-scale fabrication of vertically aligned ZnO nanowire arrays 有权
垂直排列的ZnO纳米线阵列的大规模制造

Large-scale fabrication of vertically aligned ZnO nanowire arrays
Abstract:
A generator includes a substrate, a first electrode layer, a dense plurality of vertically-aligned piezoelectric elongated nanostructures, an insulating layer and a second electrode layer. The substrate has a top surface and the first electrode layer is disposed on the top surface of the substrate. The dense plurality of vertically-aligned piezoelectric elongated nanostructures extends from the first electrode layer. Each of the nanostructures has a top end. The insulating layer is disposed on the top ends of the nanostructures. The second electrode layer is disposed on the non-conductive layer and is spaced apart from the nanostructures.
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