Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US13534844Application Date: 2012-06-27
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Publication No.: US08829679B2Publication Date: 2014-09-09
- Inventor: Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
- Applicant: Hiroyuki Chibahara , Atsushi Ishii , Naoki Izumi , Masahiro Matsumoto
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: McDermott Will & Emery LLP
- Priority: JP2008-142872 20080530
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A semiconductor device wherein destruction of a sealing ring caused by cracking of an interlayer dielectric film is difficult to occur, as well as a method for manufacturing the semiconductor device, are provided. A first laminate comprises first interlayer dielectric films having a first mechanical strength. A second laminate comprises second interlayer dielectric films having a mechanical strength higher than the first mechanical strength. A first region includes first metallic layers and vias provided within the first laminate. A second region includes second metallic layers and vias provided within the second laminate. When seen in plan, the second region overlaps at least a part of the first region, is not coupled with the first region by vias, and sandwiches the second interlayer dielectric film between it and the first region.
Public/Granted literature
- US20120267793A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-10-25
Information query
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