Invention Grant
- Patent Title: Approach to integrate Schottky in MOSFET
- Patent Title (中): 将肖特基集成在MOSFET中的方法
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Application No.: US13873017Application Date: 2013-04-29
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Publication No.: US08828857B2Publication Date: 2014-09-09
- Inventor: Sik Lui , Yi Su , Daniel Ng , Anup Bhalla
- Applicant: Alpha and Omega Semiconductor Incorporated
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee: Alpha and Omega Semiconductor Incorporated
- Current Assignee Address: US CA Sunnyvale
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/02

Abstract:
An integrated structure combines field effect transistors and a Schottky diode. Trenches formed into a substrate composition extend along a depth of the substrate composition forming mesas therebetween. Each trench is filled with conductive material separated from the trench walls by dielectric material forming a gate region. Two first conductivity type body regions inside each mesa form wells partly into the depth of the substrate composition. An exposed portion of the substrate composition separates the body regions. Second conductivity type source regions inside each body region are adjacent to and on opposite sides of each well. Schottky barrier metal inside each well forms Schottky junctions at interfaces with exposed vertical sidewalls of the exposed portion of the substrate composition separating the body regions.
Public/Granted literature
- US20140151790A1 APPROACH TO INTEGRATE SCHOTTKY IN MOSFET Public/Granted day:2014-06-05
Information query
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