Invention Grant
- Patent Title: Negative resist composition and patterning process
- Patent Title (中): 负阻抗组成和图案化工艺
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Application No.: US14063752Application Date: 2013-10-25
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Publication No.: US08828645B2Publication Date: 2014-09-09
- Inventor: Akinobu Tanaka , Keiichi Masunaga , Daisuke Domon , Satoshi Watanabe
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2009-280063 20091210
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/26 ; G03F7/038 ; G03F7/20 ; G03F1/00

Abstract:
There is disclosed a negative resist composition comprising at least: (A) a base polymer that is alkaline-soluble and is made alkaline-insoluble by action of an acid; (B) an acid generator; and (C) a basic component, wherein the base polymer at least contains a polymer including repeating units represented by the following general formula (1) and general formula (2) and having a weight average molecular weight of 1,000 to 10,000. There can be a negative resist composition hardly causing a bridge in forming a pattern and providing a high resolution and a patterning process using the same.
Public/Granted literature
- US20140051025A1 NEGATIVE RESIST COMPOSITION AND PATTERNING PROCESS Public/Granted day:2014-02-20
Information query
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