Invention Grant
US08828528B2 Barrier film and method of manufacturing the same 有权
阻隔膜及其制造方法

Barrier film and method of manufacturing the same
Abstract:
A barrier film includes a base which is formed of a plastic film having a first surface and a second surface opposed to the first surface, a first barrier layer which is formed on the first surface by an atomic layer deposition method and is made of an inorganic material having a water vapor barrier property; and a second barrier layer which is formed on the second surface by an atomic layer deposition method and is made of an inorganic material having a water vapor barrier property.
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