Invention Grant
US08828499B2 Use of a target for spark evaporation, and method for producing a target suitable for said use
有权
使用目标进行火花蒸发，以及生产适用于所述用途的靶的方法
- Patent Title: Use of a target for spark evaporation, and method for producing a target suitable for said use
- Patent Title (中): 使用目标进行火花蒸发，以及生产适用于所述用途的靶的方法
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Application No.: US13059257Application Date: 2009-08-10
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Publication No.: US08828499B2Publication Date: 2014-09-09
- Inventor: Denis Kurapov , Markus Lechthaler
- Applicant: Denis Kurapov , Markus Lechthaler
- Applicant Address: CH Truebbach
- Assignee: Oerlikon Trading AG, Truebbach
- Current Assignee: Oerlikon Trading AG, Truebbach
- Current Assignee Address: CH Truebbach
- Agency: Pearne & Gordon LLP
- Priority: EP08014592 20080817; EP08017715 20081009
- International Application: PCT/EP2009/005803 WO 20090810
- International Announcement: WO2010/020362 WO 20100225
- Main IPC: C08F2/48
- IPC: C08F2/48 ; B05D5/06 ; B01D5/00 ; C25B9/00 ; C23C14/08 ; C23C14/32 ; C23C14/34 ; C23C14/06
Abstract:
The invention relates to a method for using a target for a coating process of metal oxide and/or metal nitride coatings by means of spark evaporation, wherein the target can be operated at a temperature that is higher than the melting point of the metal used in the target, and wherein the target is comprised of a metal whose oxides and/or nitrides are not electrically conducting. The invention further relates to the use of a target for producing metal oxide coatings and/or metal nitride coatings by means of spark evaporation, wherein the target has a matrix comprised of a metal, in which matrix non electrically conducting oxides and/or nitrides of the metal are embedded.
Public/Granted literature
- US20110143054A1 USE OF A TARGET FOR SPARK EVAPORATION, AND METHOD FOR PRODUCING A TARGET SUITABLE FOR SAID USE Public/Granted day:2011-06-16
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