Invention Grant
- Patent Title: Methods for automatically determining capacitor values and systems thereof
- Patent Title (中): 自动确定电容器值及其系统的方法
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Application No.: US13177620Application Date: 2011-07-07
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Publication No.: US08828259B2Publication Date: 2014-09-09
- Inventor: Arthur H. Sato
- Applicant: Arthur H. Sato
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: C03C15/00
- IPC: C03C15/00 ; H01J37/32

Abstract:
A method for automatically performing power matching using a mechanical RF match during substrate processing is provided. The method includes providing a plurality of parameters for the substrate processing wherein the plurality of parameters including at least a predefined number of learning cycles. The method also includes setting the mechanical RF match to operate in a mechanical tuning mode. The method further includes providing a first set of instructions to the substrate processing to ignore a predefined number of cycles of Rapid Alternating Process RAP steps. The method yet also includes operating the mechanical RF match in the mechanical tuning mode for the predefined number of learning cycles. The method yet further includes determining a set of optimal capacitor values. The method moreover includes providing a second set of instructions to a power generator to operate in a frequency tuning mode.
Public/Granted literature
- US20130008871A1 METHODS FOR AUTOMATICALLY DETERMINING CAPACITOR VALUES AND SYSTEMS THEREOF Public/Granted day:2013-01-10
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