Invention Grant
US08828198B2 Cylindrical sputtering target 有权
圆柱形溅射靶

Cylindrical sputtering target
Abstract:
To provide a cylindrical sputtering target, whereby cracking during sputtering can be remarkably reduced.A cylindrical sputtering target, wherein a cylindrical target material made of ITO or AZO has a relative density of at least 90%; the angle between the grinding direction on its outer circumferential surface and a straight line parallel with its cylindrical axis (out of such angles, θ represents an angle between 0° and 90°) satisfies 45° πR/L (where R is an outside diameter of the cylindrical target material, and L is the length of the cylindrical target material); and the surface roughness Ra of the outer circumferential surface of the cylindrical target material is at most 3 μm.
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