Invention Grant
US08828143B2 Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid
有权
用于在液体或超临界流体中快速热控制工件的装置和方法
- Patent Title: Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid
- Patent Title (中): 用于在液体或超临界流体中快速热控制工件的装置和方法
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Application No.: US11866232Application Date: 2007-10-02
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Publication No.: US08828143B2Publication Date: 2014-09-09
- Inventor: John P. Simons , Kenneth J. McCullough , Wayne M. Moreau , John M. Cotte , Keith R. Pope , Charles J. Taft , Dario L. Goldfarb
- Applicant: John P. Simons , Kenneth J. McCullough , Wayne M. Moreau , John M. Cotte , Keith R. Pope , Charles J. Taft , Dario L. Goldfarb
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Daniel P. Morris
- Main IPC: B08B3/10
- IPC: B08B3/10 ; B08B7/04 ; H01L21/67 ; B08B7/00 ; H01L21/02
Abstract:
A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.
Public/Granted literature
- US20130210235A1 APPARATUS AND METHOD FOR THE RAPID THERMAL CONTROL OF A WORK PIECE IN LIQUID OR SUPERCRITICAL FLUID Public/Granted day:2013-08-15
Information query
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