Invention Grant
US08827771B2 Polishing composition and polishing method using the same 有权
抛光组合物和抛光方法使用相同

  • Patent Title: Polishing composition and polishing method using the same
  • Patent Title (中): 抛光组合物和抛光方法使用相同
  • Application No.: US12999475
    Application Date: 2009-06-15
  • Publication No.: US08827771B2
    Publication Date: 2014-09-09
  • Inventor: Taira OtsuKeigo Ohashi
  • Applicant: Taira OtsuKeigo Ohashi
  • Applicant Address: JP Kiyosu-shi
  • Assignee: Fujimi Incorporated
  • Current Assignee: Fujimi Incorporated
  • Current Assignee Address: JP Kiyosu-shi
  • Agency: Vidas, Arrett & Steinkraus
  • Priority: JP2008-159192 20080618
  • International Application: PCT/JP2009/060848 WO 20090615
  • International Announcement: WO2009/154164 WO 20091223
  • Main IPC: B24B7/22
  • IPC: B24B7/22
Polishing composition and polishing method using the same
Abstract:
There is provided a polishing composition, containing abrasive grains and an acid represented either by R2—R1—SO3H (wherein R1 is a linear alkylene or hydroxyalkylene group having 1 to 4 carbon atoms, and R2 is a hydroxy group, a carboxy group, or a sulfonic acid group when R1 is the linear alkylene group, or R2 is a carboxy group or a hydroxymethyl group when R1 is the linear hydroxyalkylene group), or by C6H5—R3 (wherein R3 is a sulfonic acid group or a phosphonic acid group). The acid contained in the polishing composition is preferably isethionic acid or benzenesulfonic acid. The polishing composition is mainly used in the application of polishing silicon oxide materials including glass substrates for hard disks, synthetic quartz substrates for photomasks, and low-dielectric-constant films such as silicon dioxide films, BPSG films, PSG films, FSG films, and organosiloxane films of semiconductor devices.
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