Invention Grant
- Patent Title: Nano-imprint mold
- Patent Title (中): 纳米印模
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Application No.: US13169139Application Date: 2011-06-27
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Publication No.: US08827685B2Publication Date: 2014-09-09
- Inventor: Yukihiro Tsuji , Masaki Yanagisawa
- Applicant: Yukihiro Tsuji , Masaki Yanagisawa
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agency: Smith, Gambrell & Russell LLP
- Priority: JP2010-152360 20100702
- Main IPC: B29C59/02
- IPC: B29C59/02 ; B82Y20/00 ; B29C43/02 ; B29C43/06 ; B29C43/14

Abstract:
A nano-imprint mold includes a mold base; mold body having a first surface and a second surface opposite the first surface; and an elastic body disposed between a surface of the mold base and the first surface of the mold body, the elastic body being composed of resin. The second surface of the mold body is provided with a nano-imprint pattern. In addition, the elastic body has a bulk modulus lower than a bulk modulus of the mold body.
Public/Granted literature
- US20120003348A1 NANO-IMPRINT MOLD Public/Granted day:2012-01-05
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