Invention Grant
US08798778B2 Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool
有权
通过控制处理工具中的传输顺序来同步室停机时间的方法和系统
- Patent Title: Method and system for synchronizing chamber down times by controlling transport sequencing in a process tool
- Patent Title (中): 通过控制处理工具中的传输顺序来同步室停机时间的方法和系统
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Application No.: US12643294Application Date: 2009-12-21
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Publication No.: US08798778B2Publication Date: 2014-08-05
- Inventor: Kilian Schmidt
- Applicant: Kilian Schmidt
- Applicant Address: US CA Sunnyvale
- Assignee: Advanced Micro Devices, Inc.
- Current Assignee: Advanced Micro Devices, Inc.
- Current Assignee Address: US CA Sunnyvale
- Priority: DE102008063426 20081231; DE102009046751 20091117
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G04F1/00
Abstract:
A cluster tool may be operated on the basis of an enhanced sequencing regime in which the supply of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously. Consequently, the occurrence of non-correlated sequential down times of various process chambers may be significantly reduced, thereby enhancing throughput and availability of complex cluster tools.
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