Invention Grant
US08798410B2 Optical system with integrated photodetector using a self-aligned double U-groove structure
有权
具有集成光电检测器的光学系统采用自对准双U形槽结构
- Patent Title: Optical system with integrated photodetector using a self-aligned double U-groove structure
- Patent Title (中): 具有集成光电检测器的光学系统采用自对准双U形槽结构
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Application No.: US13494803Application Date: 2012-06-12
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Publication No.: US08798410B2Publication Date: 2014-08-05
- Inventor: Ningning Feng , Xiaochen Sun , Dawei Zheng
- Applicant: Ningning Feng , Xiaochen Sun , Dawei Zheng
- Applicant Address: US CA Walnut
- Assignee: Laxense Inc.
- Current Assignee: Laxense Inc.
- Current Assignee Address: US CA Walnut
- Agency: Chen Yoshimura LLP
- Main IPC: G02B6/12
- IPC: G02B6/12 ; H01L31/12 ; H01L33/58
Abstract:
An optical system includes a silicon substrate, a 45-degree or 54.7-degree reflector formed in the silicon substrate, deeply etched double U-shape trenches formed in the silicon substrate, a thin film disposed on the reflector surface with total or partial optical refection, a top and bottom surface contacted p-i-n structure formed in the silicon substrate for optical power monitoring, a plurality of rectangular or wedge shaped spacers formed on top surface of the silicon substrate, and a surface emitting light source flip-chip bonded on the silicon substrate via the spacers.
Public/Granted literature
- US20130330034A1 OPTICAL SYSTEM WITH INTEGRATED PHOTODETECTOR USING A SELF-ALIGNED DOUBLE U-GROOVE STRUCTURE Public/Granted day:2013-12-12
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