Invention Grant
- Patent Title: Actuator, method for manufacturing actuator, and optical scanner
- Patent Title (中): 执行器,制造执行器的方法和光学扫描仪
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Application No.: US13358768Application Date: 2012-01-26
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Publication No.: US08797625B2Publication Date: 2014-08-05
- Inventor: Yasushi Mizoguchi
- Applicant: Yasushi Mizoguchi
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2011-058556 20110316
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
An actuator includes a base made of silicon and including a movable portion capable of oscillating around an oscillation axis, at least one connection portion extending from the movable portion, and a support portion that supports the connection portion, an insulating layer provided on a surface of the base, and a conductive portion having conductivity and provided on the insulating layer. In a plan view of the base viewed in a thickness direction of the base, the insulating layer is provided on portions other than an edge of the connection portion, an edge that connects an edge of the movable portion to the edge of the connection portion, and an edge that connects an edge of the support portion to the edge of the connection portion.
Public/Granted literature
- US20120236383A1 ACTUATOR, METHOD FOR MANUFACTURING ACTUATOR, AND OPTICAL SCANNER Public/Granted day:2012-09-20
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