Invention Grant
- Patent Title: Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer
- Patent Title (中): 包括压电层和反压电层的体声波谐振器
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Application No.: US13286051Application Date: 2011-10-31
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Publication No.: US08796904B2Publication Date: 2014-08-05
- Inventor: Dariusz Burak , Kevin J. Grannen , John D. Larson, III , Alexandre Shirakawa
- Applicant: Dariusz Burak , Kevin J. Grannen , John D. Larson, III , Alexandre Shirakawa
- Applicant Address: SG Singapore
- Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee: Avago Technologies General IP (Singapore) Pte. Ltd.
- Current Assignee Address: SG Singapore
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H03H9/58

Abstract:
In a representative embodiment, a bulk acoustic wave (BAW) resonator, comprises: a first electrode disposed over a substrate; a first piezoelectric layer disposed over the first electrode, the first piezoelectric layer having a first c-axis oriented along a first direction; a second electrode disposed over the first piezoelectric layer; and a second piezoelectric layer disposed over the first electrode and adjacent to the first piezoelectric layer, wherein the second piezoelectric layer has a second c-axis oriented in a second direction that is substantially antiparallel to the first direction.
Public/Granted literature
- US20130106248A1 BULK ACOUSTIC RESONATOR COMPRISING PIEZOELECTRIC LAYER AND INVERSE PIEZOELECTRIC LAYER Public/Granted day:2013-05-02
Information query
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