Invention Grant
- Patent Title: Electronic device covered by multiple layers and method for manufacturing electronic device
- Patent Title (中): 多层覆盖的电子设备及制造电子设备的方法
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Application No.: US13286494Application Date: 2011-11-01
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Publication No.: US08796845B2Publication Date: 2014-08-05
- Inventor: Yoko Kanemoto , Akira Sato , Shogo Inaba
- Applicant: Yoko Kanemoto , Akira Sato , Shogo Inaba
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-245974 20101102
- Main IPC: H01L23/02
- IPC: H01L23/02 ; H01L23/06 ; H01L23/04

Abstract:
An electronic device according to the invention includes: a substrate; an MEMS structure formed above the substrate; and a covering structure defining a cavity in which the MEMS structure is arranged, wherein the covering structure has a first covering layer covering from above the cavity and having a through-hole in communication with the cavity and a second covering layer formed above the first covering layer and closing the through-hole, the first covering layer has a first region located above at least the MEMS structure and a second region located around the first region, the first covering layer is thinner in the first region than in the second region, and a distance between the substrate and the first covering layer in the first region is longer than a distance between the substrate and the first covering layer in the second region.
Public/Granted literature
- US20120104593A1 ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE Public/Granted day:2012-05-03
Information query
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