Invention Grant
US08796645B2 Exposure apparatus for photoalignment process and method for manufacturing liquid crystal display 有权
用于光对准工艺的曝光装置和用于制造液晶显示器的方法

Exposure apparatus for photoalignment process and method for manufacturing liquid crystal display
Abstract:
An exposure apparatus for a photoalignment process includes; a first photomask including a plurality of transmission parts; and a second photomask including a plurality of transmission parts, where the first photomask and the second photomask partially overlap each other such that each of the first photomask and the second photomask includes an overlapping region and a non-overlapping region, the overlapping region of at least one of the first photomask and the overlapping region of the second photomask includes at least two subregions, and shapes or arrangements of the transmission parts in the at least two subregions are different from each other.
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