Invention Grant
US08796645B2 Exposure apparatus for photoalignment process and method for manufacturing liquid crystal display
有权
用于光对准工艺的曝光装置和用于制造液晶显示器的方法
- Patent Title: Exposure apparatus for photoalignment process and method for manufacturing liquid crystal display
- Patent Title (中): 用于光对准工艺的曝光装置和用于制造液晶显示器的方法
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Application No.: US13241376Application Date: 2011-09-23
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Publication No.: US08796645B2Publication Date: 2014-08-05
- Inventor: Soo-Ryun Cho , Jun Woo Lee , Kyoung Tae Kim , Joo Seok Yeom , Suk Hoon Kang , Eun Ju Kim
- Applicant: Soo-Ryun Cho , Jun Woo Lee , Kyoung Tae Kim , Joo Seok Yeom , Suk Hoon Kang , Eun Ju Kim
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2011-0053971 20110603
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G03F1/00

Abstract:
An exposure apparatus for a photoalignment process includes; a first photomask including a plurality of transmission parts; and a second photomask including a plurality of transmission parts, where the first photomask and the second photomask partially overlap each other such that each of the first photomask and the second photomask includes an overlapping region and a non-overlapping region, the overlapping region of at least one of the first photomask and the overlapping region of the second photomask includes at least two subregions, and shapes or arrangements of the transmission parts in the at least two subregions are different from each other.
Public/Granted literature
- US20120308936A1 EXPOSURE APPARATUS FOR PHOTOALIGNMENT PROCESS AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY Public/Granted day:2012-12-06
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