Invention Grant
- Patent Title: Device structure for a RRAM and method
- Patent Title (中): RRAM和方法的设备结构
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Application No.: US13598550Application Date: 2012-08-29
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Publication No.: US08796102B1Publication Date: 2014-08-05
- Inventor: Mark Harold Clark
- Applicant: Mark Harold Clark
- Applicant Address: US CA Santa Clara
- Assignee: Crossbar, Inc.
- Current Assignee: Crossbar, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Ogawa P.C.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A method of forming a resistive device includes forming a first wiring layer overlying a first dielectric on top of a substrate, forming a junction material, patterning the first wiring layer and junction material to expose a portion of the first dielectric, forming a second dielectric over the patterned first wiring layer, forming an opening in the second dielectric to expose a portion of the junction material, forming a resistive switching material over the portion of the junction material in the opening, the resistive switching material having an intrinsic semiconductor characteristic, forming a conductive material over the resistive switching material, etching the conductive material and the resistive switching material to expose respective sidewalls of the resistive switching material and the conductive material, and the second dielectric, and forming a second wiring layer over the conductive material in contact with the respective sidewalls and the second dielectric.
Information query
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