Invention Grant
US08796092B2 Method for manufacturing semiconductor device with first and second gates over buried bit line
有权
用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
- Patent Title: Method for manufacturing semiconductor device with first and second gates over buried bit line
- Patent Title (中): 用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
-
Application No.: US13745635Application Date: 2013-01-18
-
Publication No.: US08796092B2Publication Date: 2014-08-05
- Inventor: Hyung Jin Park
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK Hynix Inc.
- Current Assignee: SK Hynix Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2010-0071529 20100723
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to a silicon layer formed over a gate, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; a plurality of gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; a silicon layer disposed on the upper portion and sidewalls of the gate; and a second plug coupled to the silicon layer disposed over the gate.
Public/Granted literature
- US20130130453A1 Method for manufacturing semiconductor device with first and second gates over buried bit line Public/Granted day:2013-05-23
Information query
IPC分类: