Invention Grant
US08796092B2 Method for manufacturing semiconductor device with first and second gates over buried bit line 有权
用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法

  • Patent Title: Method for manufacturing semiconductor device with first and second gates over buried bit line
  • Patent Title (中): 用于在掩埋位线上制造具有第一和第二栅极的半导体器件的方法
  • Application No.: US13745635
    Application Date: 2013-01-18
  • Publication No.: US08796092B2
    Publication Date: 2014-08-05
  • Inventor: Hyung Jin Park
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2010-0071529 20100723
  • Main IPC: H01L29/66
  • IPC: H01L29/66
Method for manufacturing semiconductor device with first and second gates over buried bit line
Abstract:
A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to a silicon layer formed over a gate, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; a plurality of gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; a silicon layer disposed on the upper portion and sidewalls of the gate; and a second plug coupled to the silicon layer disposed over the gate.
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