Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
- Patent Title (中): 抗蚀剂图案的抗蚀剂组成和方法
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Application No.: US13847295Application Date: 2013-03-19
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Publication No.: US08795947B2Publication Date: 2014-08-05
- Inventor: Tomoyuki Hirano , Makiko Irie , Kotaro Endo , Tsuyoshi Kurosawa
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2012-066367 20120322
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; C08F20/10

Abstract:
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under the action of acid and an acid-generator component (B) which generates acid upon exposure, the base component (A) containing a polymeric compound (A1) including a structural unit (a0) represented by general formula (a0-1) and a structural unit (a1) containing an acid decomposable group which exhibits increased polarity by the action of acid (R1 represents a hydrogen atom, an alkyl group of 1 to 5 carbon atoms or a halogenated alkyl group of 1 to 5 carbon atoms; W represents —COO—, a —CONH— group or a divalent aromatic hydrocarbon group; Y1 and Y2 represent a divalent linking group or a single bond; R′1 represents a hydrogen atom or an alkyl group of 1 to 6 carbon atoms; R′2 represents a monovalent aliphatic hydrocarbon group; and R2 represents an —SO2— containing cyclic group).
Public/Granted literature
- US20130252171A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2013-09-26
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