Invention Grant
US08795946B2 Polymerizable ester compound, polymer, resist composition, and patterning process 有权
可聚合酯化合物,聚合物,抗蚀剂组合物和图案化工艺

Polymerizable ester compound, polymer, resist composition, and patterning process
Abstract:
Polymerizable ester compounds having formula (1) are novel wherein R1 is H, F, methyl or trifluoromethyl, R2 is an acid labile group, Aa is a divalent hydrocarbon group which may be separated by —O— or —C(═O)—, and k1 is 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation ≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent developed properties.
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