Invention Grant
US08795946B2 Polymerizable ester compound, polymer, resist composition, and patterning process
有权
可聚合酯化合物,聚合物,抗蚀剂组合物和图案化工艺
- Patent Title: Polymerizable ester compound, polymer, resist composition, and patterning process
- Patent Title (中): 可聚合酯化合物,聚合物,抗蚀剂组合物和图案化工艺
-
Application No.: US13548654Application Date: 2012-07-13
-
Publication No.: US08795946B2Publication Date: 2014-08-05
- Inventor: Koji Hasegawa , Masayoshi Sagehashi , Yuuki Suka , Masashi Ilo
- Applicant: Koji Hasegawa , Masayoshi Sagehashi , Yuuki Suka , Masashi Ilo
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-155417 20110714
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/38 ; C08F24/00

Abstract:
Polymerizable ester compounds having formula (1) are novel wherein R1 is H, F, methyl or trifluoromethyl, R2 is an acid labile group, Aa is a divalent hydrocarbon group which may be separated by —O— or —C(═O)—, and k1 is 0 or 1. They are useful as monomers to produce polymers which are transparent to radiation ≦500 nm. Radiation-sensitive resist compositions comprising the polymers as base resin exhibit excellent developed properties.
Public/Granted literature
- US20130017484A1 POLYMERIZABLE ESTER COMPOUND, POLYMER, RESIST COMPOSITION, AND PATTERNING PROCESS Public/Granted day:2013-01-17
Information query
IPC分类: