Invention Grant
- Patent Title: Symmetric thermocentric flexure with minimal yaw error motion
- Patent Title (中): 具有最小偏航误差运动的对称热弯曲
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Application No.: US12425624Application Date: 2009-04-17
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Publication No.: US08795572B2Publication Date: 2014-08-05
- Inventor: Vijay Shilpiekandula , Kamal Youcef-Toumi
- Applicant: Vijay Shilpiekandula , Kamal Youcef-Toumi
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Gesmer Updegrove LLP
- Main IPC: B29C59/00
- IPC: B29C59/00
Abstract:
A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged in a symmetric configuration around the one or more optical flats so as to minimize the error yaw motion (θz) from thermal fluctuations associated with fixturing the one or more optical flats.
Public/Granted literature
- US20090263531A1 SYMMETRIC THERMOCENTRIC FLEXURE WITH MINIMAL YAW ERROR MOTION Public/Granted day:2009-10-22
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