Invention Grant
- Patent Title: Sputtering target and method for producing the same
- Patent Title (中): 溅射靶材及其制造方法
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Application No.: US13262540Application Date: 2010-11-04
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Publication No.: US08795489B2Publication Date: 2014-08-05
- Inventor: Shoubin Zhang , Yoshinori Shirai
- Applicant: Shoubin Zhang , Yoshinori Shirai
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Materials Corporation
- Current Assignee: Mitsubishi Materials Corporation
- Current Assignee Address: JP Tokyo
- Agency: Edwards Wildman Palmer LLP
- Agent Jeffrey D. Hsi
- Priority: JP2009-255540 20091106; JP2010-241749 20101028
- International Application: PCT/JP2010/006481 WO 20101104
- International Announcement: WO2011/055537 WO 20110512
- Main IPC: C23C14/34
- IPC: C23C14/34

Abstract:
[Problems]To provide a sputtering target that is capable of forming a Cu—Ga film to which Na is favorably added by a sputtering method, and a method for producing the same.[Means for Solving the Problems]The sputtering target is provided wherein 20 to 40 at % of Ga and 0.05 to 1 at % of Na are contained as metal components except fluorine (F) of the sputtering target, a remaining portion has a component composition consisting of Cu and unavoidable impurities, and Na is contained in the state of a NaF compound. Also, a method for producing the sputtering target includes the steps of forming a molded article consisting of a mixed powder of NaF powder and Cu—Ga powder or a mixed powder of NaF powder, Cu—Ga powder, and Cu powder; and sintering the molded article in a vacuum atmosphere, an inert gas atmosphere, or a reducing atmosphere.
Public/Granted literature
- US20120217157A1 SPUTTERING TARGET AND METHOD FOR PRODUCING THE SAME Public/Granted day:2012-08-30
Information query
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