Invention Grant
US08795463B2 Joint system, joint method, program and computer storage medium
有权
联合系统,联合方法,程序和计算机存储介质
- Patent Title: Joint system, joint method, program and computer storage medium
- Patent Title (中): 联合系统,联合方法,程序和计算机存储介质
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Application No.: US13581353Application Date: 2011-03-01
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Publication No.: US08795463B2Publication Date: 2014-08-05
- Inventor: Takahiro Nishibayashi , Yasuharu Iwashita , Takeshi Tamura , Tatsuya Kitayama
- Applicant: Takahiro Nishibayashi , Yasuharu Iwashita , Takeshi Tamura , Tatsuya Kitayama
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2010-051911 20100309
- International Application: PCT/JP2011/054606 WO 20110301
- International Announcement: WO2011/111565 WO 20110915
- Main IPC: B29C65/00
- IPC: B29C65/00 ; H01L21/18 ; H01L21/67

Abstract:
A joint system includes: a transfer-in/out station capable of holding a plurality of substrates or a plurality of superposed substrates, and transferring-in/out the substrates or superposed substrates to/from a processing station; and the processing station performing predetermined processing on the substrates and joining the substrates together. The processing station includes: a surface activation apparatus activating a front surface of the substrate; a surface hydrophilizing apparatus hydrophilizing and cleaning the front surface of the substrate; a joint apparatus joining the substrates together; and a transfer region for transferring the substrate or superposed substrate to the surface activation apparatus, the surface hydrophilizing apparatus, and the joint apparatus.
Public/Granted literature
- US20120318432A1 JOINT SYSTEM, JOINT METHOD, PROGRAM AND COMPUTER STORAGE MEDIUM Public/Granted day:2012-12-20
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