Invention Grant
- Patent Title: Method for producing gallium nitride layer and seed crystal substrate used in same
- Patent Title (中): 用于制造氮化镓层的方法及其种子晶体基板
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Application No.: US14032297Application Date: 2013-09-20
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Publication No.: US08795431B2Publication Date: 2014-08-05
- Inventor: Katsuhiro Imai , Makota Iwai , Takanao Shimodaira , Masahiro Sakai , Shuhei Higashihara , Takayuki Hirao
- Applicant: NGK Insulators, Ltd.
- Applicant Address: JP Aichi-prefeccture
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Aichi-prefeccture
- Agency: Cermak Nakajima LLP
- Agent Tomoko Nakajima
- Priority: JP2011-062059 20110322
- Main IPC: C30B21/02
- IPC: C30B21/02

Abstract:
A gallium nitride layer is produced using a seed crystal substrate by flux method. The seed crystal substrate 8A includes a supporting body 1, a plurality of seed crystal layers 4A each comprising gallium nitride single crystal and separated from one another, a low temperature buffer layer 2 provided between the seed crystal layers 4A and the supporting body and made of a nitride of a group III metal element, and an exposed layer 3 exposed to spaces between the adjacent seed crystal layers 4A and made of aluminum nitride single crystal or aluminum gallium nitride single crystal. The gallium nitride layer is grown on the seed crystal layers by flux method.
Public/Granted literature
- US20140014028A1 Method for Producing Gallium Nitride Layer and Seed Crystal Substrate Used in Same Public/Granted day:2014-01-16
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