Invention Grant
- Patent Title: Vibration damper for vacuum pumps
- Patent Title (中): 真空泵减振器
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Application No.: US13072997Application Date: 2011-03-28
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Publication No.: US08794678B2Publication Date: 2014-08-05
- Inventor: Carmelo Quartarone , Luca Bonmassar , Silvio Giors , Vincenzo Pandolfo
- Applicant: Carmelo Quartarone , Luca Bonmassar , Silvio Giors , Vincenzo Pandolfo
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Priority: ITTO2010A0313 20100416
- Main IPC: F16L37/248
- IPC: F16L37/248 ; F16L17/06

Abstract:
In a vibration damper of a turbomolecular vacuum pump, a vacuum tightness function and a vibration damping function are both performed by one or more toroidal rings made of an elastic material. The elastic rings assume a resting configuration while the vacuum pump is not operating and the damper is at atmospheric pressure, and they assume a compressed configuration while the vacuum pump is operating and the damper is under vacuum conditions. In the compressed configuration, the elastic rings are deformed due to a compression force. This deformation of the elastic rings prevents metal-to-metal contact between the vacuum pump and a vacuum chamber to which the pump is connected through the damper.
Public/Granted literature
- US20110254263A1 VIBRATION DAMPER FOR VACUUM PUMPS Public/Granted day:2011-10-20
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