Invention Grant
- Patent Title: Two-dimension precision transfer equipment, three-dimension precision transfer equipment, and coordinate measuring machine
- Patent Title (中): 二维精密传输设备,三维精密传输设备和坐标测量机
-
Application No.: US13613706Application Date: 2012-09-13
-
Publication No.: US08794610B2Publication Date: 2014-08-05
- Inventor: Hisayoshi Sakai
- Applicant: Hisayoshi Sakai
- Applicant Address: JP Kanagawa
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2011-205382 20110920; JP2012-015032 20120127
- Main IPC: B23Q1/25
- IPC: B23Q1/25 ; G05B11/32 ; G05B1/06 ; G03B27/58

Abstract:
A coordinate measuring machine includes a three-dimension precision transfer equipment and a measuring equipment that measures an object. The three-dimension precision transfer equipment includes a movable body, first to third driving bodies, first to third drive mechanisms that drive to move the first to third driving bodies forward and backward in a first direction, a second direction and a vertical direction that are mutually orthogonal, and first to third laser interferometers that detect a displacement of the movable body. The first to third driving bodies include first to third joints that forms a static-pressure clearance between the first to third driving bodies and the movable body. Laser paths of the first to third laser interferometers extend in a manner to respectively penetrate the first to third driving bodies and the first to third joints.
Public/Granted literature
Information query