Invention Grant
US08794610B2 Two-dimension precision transfer equipment, three-dimension precision transfer equipment, and coordinate measuring machine 有权
二维精密传输设备,三维精密传输设备和坐标测量机

Two-dimension precision transfer equipment, three-dimension precision transfer equipment, and coordinate measuring machine
Abstract:
A coordinate measuring machine includes a three-dimension precision transfer equipment and a measuring equipment that measures an object. The three-dimension precision transfer equipment includes a movable body, first to third driving bodies, first to third drive mechanisms that drive to move the first to third driving bodies forward and backward in a first direction, a second direction and a vertical direction that are mutually orthogonal, and first to third laser interferometers that detect a displacement of the movable body. The first to third driving bodies include first to third joints that forms a static-pressure clearance between the first to third driving bodies and the movable body. Laser paths of the first to third laser interferometers extend in a manner to respectively penetrate the first to third driving bodies and the first to third joints.
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