Invention Grant
- Patent Title: Method for the precise measuring operation of a micromechanical rotation rate sensor
- Patent Title (中): 微机械转速传感器的精确测量操作方法
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Application No.: US13266613Application Date: 2010-04-28
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Publication No.: US08794047B2Publication Date: 2014-08-05
- Inventor: Stefan Günthner , Roland Hilser , Ramnath Sivaraman , Bernhard Schmid , Petri Klemetti
- Applicant: Stefan Günthner , Roland Hilser , Ramnath Sivaraman , Bernhard Schmid , Petri Klemetti
- Applicant Address: DE FI
- Assignee: Continental Teves AG & Co. oHG,VTI Technologies Oy
- Current Assignee: Continental Teves AG & Co. oHG,VTI Technologies Oy
- Current Assignee Address: DE FI
- Agency: RatnerPrestia
- Priority: DE102009019318 20090430
- International Application: PCT/EP2010/055708 WO 20100428
- International Announcement: WO2010/125098 WO 20101104
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (UTO1, UTLO1, UTRO1) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf).
Public/Granted literature
- US20120118062A1 METHOD FOR THE PRECISE MEASURING OPERATION OF A MICROMECHANICAL ROTATION RATE SENSOR Public/Granted day:2012-05-17
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