Invention Grant
- Patent Title: Substrate temperature adjusting-fixing device
- Patent Title (中): 基板温度调节固定装置
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Application No.: US13453001Application Date: 2012-04-23
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Publication No.: US08724289B2Publication Date: 2014-05-13
- Inventor: Norio Shiraiwa , Yuichi Hata
- Applicant: Norio Shiraiwa , Yuichi Hata
- Applicant Address: JP Nagano
- Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee: Shinko Electric Industries Co., Ltd.
- Current Assignee Address: JP Nagano
- Agency: IPUSA, PLLC
- Priority: JP2011-104087 20110509
- Main IPC: H02N13/00
- IPC: H02N13/00

Abstract:
A disclosed substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an attractable object onto a base body having a built-in electrode by applying a voltage to the electrode, a base plate fixing the electro static chuck via an adhesive layer, a power supplying portion electrically connected to the electrode, and a retaining portion holding the power supplying portion, wherein the retaining portion includes a main body and a sealing portion, the main body is fixed to the base plate and has recesses opened on an opposite side of the adhesive layer and a through hole penetrating through the main body, the power supplying portion includes an electrode pin and an electric wire, the electric wire is wired inside the adhesive layer, the through hole and the recesses to electrically connect the electrode with the electrode pin, and the sealing portion fills the recesses.
Public/Granted literature
- US20120287552A1 SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE Public/Granted day:2012-11-15
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