Invention Grant
- Patent Title: Lithography mask functional optimization and spatial frequency analysis
- Patent Title (中): 光刻掩模功能优化和空间频率分析
-
Application No.: US13686682Application Date: 2012-11-27
-
Publication No.: US08707222B1Publication Date: 2014-04-22
- Inventor: P. Jeffrey Ungar , Ilhami H. Torunoglu
- Applicant: Gauda, Inc.
- Applicant Address: US CA Palo Alto
- Assignee: Gauda, Inc.
- Current Assignee: Gauda, Inc.
- Current Assignee Address: US CA Palo Alto
- Agency: Aka Chan LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F19/00 ; G03F1/00 ; G06K9/00 ; G21K5/00 ; G06F17/14

Abstract:
In an electronic design automation technique for optical proximity correction, a mask is represented by a function with an exact analytical form over a mask region. Using the physics of optical projection, a solution based on a spatial frequency analysis is determined. Spatial frequencies above a cutoff are determined by the optical system do not contribute to the projected image. Spatial frequencies below this cutoff affect the print (and the mask), while those above the cutoff only affect the mask. Frequency components in the function below this cutoff frequency may be removed, which will help to reduce computational complexity.
Information query