Invention Grant
US08692999B1 Crosstalk cancellation for a simultaneous phase shifting interferometer 有权
同时移相干涉仪的串扰消除

  • Patent Title: Crosstalk cancellation for a simultaneous phase shifting interferometer
  • Patent Title (中): 同时移相干涉仪的串扰消除
  • Application No.: US13167078
    Application Date: 2011-06-23
  • Publication No.: US08692999B1
    Publication Date: 2014-04-08
  • Inventor: Eugene Olczak
  • Applicant: Eugene Olczak
  • Applicant Address: US VA McLean
  • Assignee: Exelis, Inc.
  • Current Assignee: Exelis, Inc.
  • Current Assignee Address: US VA McLean
  • Agency: RatnerPrestia
  • Main IPC: G01B9/02
  • IPC: G01B9/02
Crosstalk cancellation for a simultaneous phase shifting interferometer
Abstract:
A method of minimizing fringe print-through in a phase-shifting interferometer, includes the steps of: (a) determining multiple transfer functions of pixels in the phase-shifting interferometer; (b) computing a crosstalk term for each transfer function; and (c) displaying, to a user, a phase-difference map using the crosstalk terms computed in step (b). Determining a transfer function in step (a) includes measuring intensities of a reference beam and a test beam at the pixels, and measuring an optical path difference between the reference beam and the test beam at the pixels. Computing crosstalk terms in step (b) includes computing an N-dimensional vector, where N corresponds to the number of transfer functions, and the N-dimensional vector is obtained by minimizing a variance of a modulation function in phase shifted images.
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