Invention Grant
US08692878B2 Methods and apparatus for simultaneously inspecting multiple array regions having different pitches
有权
用于同时检查具有不同间距的多个阵列区域的方法和装置
- Patent Title: Methods and apparatus for simultaneously inspecting multiple array regions having different pitches
- Patent Title (中): 用于同时检查具有不同间距的多个阵列区域的方法和装置
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Application No.: US13062934Application Date: 2010-06-18
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Publication No.: US08692878B2Publication Date: 2014-04-08
- Inventor: Hong Chen , Jason Z. Lin
- Applicant: Hong Chen , Jason Z. Lin
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Okamoto & Benedicto LLP
- International Application: PCT/US2010/039238 WO 20100618
- International Announcement: WO2010/148343 WO 20101223
- Main IPC: H04N7/18
- IPC: H04N7/18

Abstract:
One embodiment relates to a method of automatically inspecting multiple array regions (102) simultaneously using an imaging apparatus (302). The method includes selecting (211 or 212) an optimal pixel size such that each array region in the multiple array regions has a grouped cell which is an integer number of pixels in size, and adjusting a pixel size of the imaging apparatus to be the selected optimal pixel size. Optimal pixel sizes within an available range of pixel sizes may be determined by finding (202) a largest common divider of cell sizes of the multiple array regions when the cell sizes are expressed in integers. Pre-set criteria may be applied to determine (208) which, if any, of the optimal pixel sizes are acceptable based on pre-set criteria. If none of the optimal pixel sizes are acceptable, then one of the array regions may be marked for digital interpolation (see 216). Other embodiments, aspects, and features are also disclosed.
Public/Granted literature
- US20110164130A1 METHODS AND APPARATUS FOR SIMULTANEOUSLY INSPECTING MULTIPLE ARRAY REGIONS HAVING DIFFERENT PITCHES Public/Granted day:2011-07-07
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