Invention Grant
- Patent Title: Method and apparatus for imaging of features on a substrate
- Patent Title (中): 用于在基板上成像的方法和装置
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Application No.: US13002912Application Date: 2009-07-08
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Publication No.: US08692876B2Publication Date: 2014-04-08
- Inventor: Auguste Genovesio , Neil Emans
- Applicant: Auguste Genovesio , Neil Emans
- Applicant Address: KR Sungnam Gyeonggi
- Assignee: Institut Pasteur Korea
- Current Assignee: Institut Pasteur Korea
- Current Assignee Address: KR Sungnam Gyeonggi
- Agency: Saliwanchik, Lloyd & Eisenschenk
- International Application: PCT/EP2009/004951 WO 20090708
- International Announcement: WO2010/006727 WO 20100121
- Main IPC: H04N7/18
- IPC: H04N7/18
Abstract:
A method for imaging features on a substrate, comprising scanning the substrate and producing an image thereof, overlaying a grid model on the image, fitting the grid model to the locations of at least some of the features on the image, and extracting images of the features.
Public/Granted literature
- US20110175994A1 Method and Apparatus for Imaging of Features on a Substrate Public/Granted day:2011-07-21
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