Invention Grant
- Patent Title: Method for the selective oxidation of silicon nanoparticle semiconductor films in the presence of titanium
- Patent Title (中): 在钛存在下选择性氧化硅纳米颗粒半导体膜的方法
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Application No.: US13433072Application Date: 2012-03-28
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Publication No.: US08691672B2Publication Date: 2014-04-08
- Inventor: Themistokles Afentakis , Karen Yuri Nishimura
- Applicant: Themistokles Afentakis , Karen Yuri Nishimura
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc.
- Current Assignee: Sharp Laboratories of America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: B82Y30/00
- IPC: B82Y30/00

Abstract:
A method is provided for consuming oxides in a silicon (Si) nanoparticle film. The method forms a colloidal solution film of Si nanoparticles overlying a substrate. The Si nanoparticle colloidal solution film is annealed at a high temperature in the presence of titanium (Ti). In response to the annealing, Si oxide is consumed in a resultant Si nanoparticle film. In one aspect, the consuming the Si oxide in the Si nanoparticle film includes forming Ti oxide in the Si nanoparticle film. Also in response to a low temperature annealing, solvents are evaporated in the colloidal solution film of Si nanoparticles. Si and Ti oxide molecules are sintered in the Si nanoparticle film in response to the high temperature annealing.
Public/Granted literature
- US20130256675A1 Method for Consuming Silicon Nanoparticle Film Oxidation Public/Granted day:2013-10-03
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