Invention Grant
US08691336B2 Coating treatment method, non-transitory computer storage medium and coating treatment apparatus 有权
涂层处理方法,非暂时性计算机存储介质和涂层处理装置

Coating treatment method, non-transitory computer storage medium and coating treatment apparatus
Abstract:
A coating treatment method includes: a first step of discharging a coating solution from a nozzle to a central portion of a substrate while acceleratingly rotating the substrate, to apply the coating solution over the substrate; a second step of then decelerating the rotation of the substrate and continuously rotating the substrate; and a third step of then accelerating the rotation of the substrate to dry the coating solution on the substrate. In the first step, the acceleration of the rotation of the substrate is changed in the order of a first acceleration, a second acceleration higher than the first acceleration, and a third acceleration lower than the second acceleration to acceleratingly rotate the substrate at all times.
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