Invention Grant
- Patent Title: Processes for the purification of trichlorosilane or silicon tetrachloride
- Patent Title (中): 纯化三氯硅烷或四氯化硅的方法
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Application No.: US13606953Application Date: 2012-09-07
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Publication No.: US08691055B2Publication Date: 2014-04-08
- Inventor: Gianfranco Ghetti
- Applicant: Gianfranco Ghetti
- Applicant Address: IT
- Assignee: MEMC Electronic Materials SpA
- Current Assignee: MEMC Electronic Materials SpA
- Current Assignee Address: IT
- Agency: Armstrong Teasdale LLP
- Priority: ITRM2004A0570 20041119
- Main IPC: B01D3/14
- IPC: B01D3/14 ; B01D3/34 ; C01B33/107
Abstract:
The present disclosure relates to processes and systems for purifying technical grade trichlorosilane and/or technical grade silicon tetrachloride into electronic grade trichlorosilane and/or electronic grade silicon tetrachloride.
Public/Granted literature
- US20120325645A1 Process and System for the Purification of Trichlorosilane and Silicon Tetrachloride Public/Granted day:2012-12-27
Information query
