Invention Grant
US08689688B2 Pattern transcription device and method of fabricating cliché for the same 有权
模式转录装置及其制作方法

Pattern transcription device and method of fabricating cliché for the same
Abstract:
A pattern transcription apparatus comprises a cliché including a concave portion, a convex portion and a printing stopper, the printing stopper formed on a bottom surface of the concave portion; and a blanket, on which a resist material layer is coated, rotatable on the cliché, wherein a surface energy density of the blanket is greater than a surface energy density of the printing stopper and is smaller than a surface energy of the cliché.
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