Invention Grant
US08689630B2 Inertial force sensor and detecting element used for same 有权
惯性力传感器和检测元件相同

  • Patent Title: Inertial force sensor and detecting element used for same
  • Patent Title (中): 惯性力传感器和检测元件相同
  • Application No.: US13143100
    Application Date: 2010-02-10
  • Publication No.: US08689630B2
    Publication Date: 2014-04-08
  • Inventor: Takeshi Uemura
  • Applicant: Takeshi Uemura
  • Applicant Address: JP Osaka
  • Assignee: Panasonic Corporation
  • Current Assignee: Panasonic Corporation
  • Current Assignee Address: JP Osaka
  • Agency: Panasonic Patent Center
  • Priority: JP2009-030787 20090213
  • International Application: PCT/JP2010/000815 WO 20100210
  • International Announcement: WO2010/092806 WO 20100819
  • Main IPC: G01C19/56
  • IPC: G01C19/56
Inertial force sensor and detecting element used for same
Abstract:
A detecting element for an inertial force sensor includes a mass section, an excitation section, and a detecting section. The excitation section excites the mass section along a third direction among a first direction, a second direction, and the third direction that are perpendicular to each other. The detecting section outputs a signal corresponding to displacement of the mass section along at least one of the first direction and the second direction. Resonance frequencies of the first direction and the second direction are set greater than a resonance frequency of the third direction.
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