Invention Grant
- Patent Title: Probe head scanning probe microscope including the same
- Patent Title (中): 探针头扫描探针显微镜包括相同
-
Application No.: US13568768Application Date: 2012-08-07
-
Publication No.: US08689360B2Publication Date: 2014-04-01
- Inventor: In-su Jeon
- Applicant: In-su Jeon
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2011-0110052 20111026
- Main IPC: G01Q70/02
- IPC: G01Q70/02
Abstract:
A probe head and a scanning probe microscope (SPM) including the probe head are provided. The probe head includes a plurality of cantilevers, each including a probe; and a holder on which the plurality of cantilevers are installed, wherein a cantilever facing a sample is changed by rotating the holder.
Public/Granted literature
- US20130111635A1 PROBE HEAD SCANNING PROBE MICROSCOPE INCLUDING THE SAME Public/Granted day:2013-05-02
Information query
