Invention Grant
- Patent Title: Pitch-aware multi-patterning lithography
- Patent Title (中): 音高感应多图案平版印刷
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Application No.: US13612790Application Date: 2012-09-12
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Publication No.: US08689151B1Publication Date: 2014-04-01
- Inventor: Kanak Behari Agarwal , Shayak Banerjee
- Applicant: Kanak Behari Agarwal , Shayak Banerjee
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Garg Law Firm, PLLC
- Agent Rakesh Garg; John Flynn
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A method, system, and computer program product for improving printability of a design of an integrated circuit (IC) using pitch-aware coloring for multi-patterning lithography (MPL) are provided in the illustrative embodiments. A first shape is identified in a layout of the IC corresponding to the design as being apart by a first distance from a second shape. The first distance is a forbidden distance and at least equal to a minimum distance requirement of a lithography system. A determination is made that the first shape and the second shape are colored using a first color. The first shape is changed to a second color, such that even though the first distance is at least equal to the minimum distance requirement of the lithography system, the first and the second shapes are placed on different masks to print the design, thereby improving the printability of the design.
Public/Granted literature
- US20140075397A1 PITCH-AWARE MULTI-PATTERNING LITHOGRAPHY Public/Granted day:2014-03-13
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