Invention Grant
- Patent Title: Transport apparatus, position teaching method, and sensor jig
- Patent Title (中): 运输设备,位置教学方法和传感器夹具
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Application No.: US12994823Application Date: 2009-05-19
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Publication No.: US08688261B2Publication Date: 2014-04-01
- Inventor: Kenji Hirota
- Applicant: Kenji Hirota
- Applicant Address: JP Fukuyama-shi
- Assignee: Rorze Corporation
- Current Assignee: Rorze Corporation
- Current Assignee Address: JP Fukuyama-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-138785 20080527
- International Application: PCT/JP2009/059181 WO 20090519
- International Announcement: WO2009/145082 WO 20091203
- Main IPC: G06F7/00
- IPC: G06F7/00 ; H01L21/68 ; B65G1/00 ; B25J9/22

Abstract:
Disclosed are a transport apparatus that holds and transports an object on a predetermined transport track using a transport portion provided at the leading end of an arm and is capable of acquiring the teaching information of a transport position using a normal transport operation, a position teaching method, and a sensor jig. A transmissive sensor (32) is provided in a sensor jig (30) such that the projection segments of an optical axis (41) and an optical axis (42) on a projection plane intersect with each other and neither the project segment of the optical axis (41) nor the projection segment of the optical axis (42) is aligned with the X-direction and the Y-direction. During a position teaching operation, the sensor jig (30) is provided so as to be held by a wafer transport portion (24), thereby detecting target members (51, 52).
Public/Granted literature
- US20110130864A1 TRANSPORT APPARATUS, POSITION TEACHING METHOD, AND SENSOR JIG Public/Granted day:2011-06-02
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