Invention Grant
US08687921B2 Image processing apparatus, image processing method, and image processing program
有权
图像处理装置，图像处理方法和图像处理程序
- Patent Title: Image processing apparatus, image processing method, and image processing program
- Patent Title (中): 图像处理装置，图像处理方法和图像处理程序
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Application No.: US13578651Application Date: 2011-03-25
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Publication No.: US08687921B2Publication Date: 2014-04-01
- Inventor: Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
- Applicant: Shinichi Shinoda , Yasutaka Toyoda , Ryoichi Matsuoka
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2010-070043 20100325
- International Application: PCT/JP2011/057274 WO 20110325
- International Announcement: WO2011/118745 WO 20110929
- Main IPC: G06K9/32
- IPC: G06K9/32
Abstract:
It is an object of the present invention is to provide an image processing technique that can detect the rotation of an observation image of a specimen with high accuracy. An image processing apparatus according to the present invention indirectly corrects a rotation gap between measurement image data and reference image data through wide-angle image data including a measurement part of a specimen (FIG. 1).
Public/Granted literature
- US20130011080A1 Image Processing Apparatus, Image Processing Method, and Image Processing Program Public/Granted day:2013-01-10
Information query
