Invention Grant
- Patent Title: Short-wavelength polarizing elements and the manufacture and use thereof
- Patent Title (中): 短波长偏振元件及其制造和应用
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Application No.: US12091668Application Date: 2006-10-31
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Publication No.: US08687274B2Publication Date: 2014-04-01
- Inventor: Koji Asakawa , Vincent Pelletier , Mingshaw Wu , Douglas H. Adamson , Richard A. Register , Paul M. Chaikin , Young-Rae Hong
- Applicant: Koji Asakawa , Vincent Pelletier , Mingshaw Wu , Douglas H. Adamson , Richard A. Register , Paul M. Chaikin , Young-Rae Hong
- Applicant Address: JP Tokyo US NJ Princeton
- Assignee: Kabushiki Kaisha Toshiba,Princeton University
- Current Assignee: Kabushiki Kaisha Toshiba,Princeton University
- Current Assignee Address: JP Tokyo US NJ Princeton
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- International Application: PCT/US2006/042378 WO 20061031
- International Announcement: WO2007/053579 WO 20070510
- Main IPC: G02B5/30
- IPC: G02B5/30
Abstract:
While gold wire grids have been used to polarize infrared wavelengths for over a hundred years, they are not appropriate for shorter wavelengths due to their large period. With embodiments of the present invention, grids with periods a few tens of nanometers can be fabricated. Among other things, such grids can be used to polarize visible and even ultraviolet light. As a result, such wire grid polarizers have a wide variety of applications and uses, such as, e.g., in the fabrication of semiconductors, nanolithography, and more.
Public/Granted literature
- US20090219617A1 SHORT-WAVELENGTH POLARIZING ELEMENTS AND THE MANUFACTURE AND USE THEREOF Public/Granted day:2009-09-03
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