Invention Grant
- Patent Title: Speckle noise reduction based on longitudinal shift of sample
- Patent Title (中): 基于样品纵向偏移的散斑降噪
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Application No.: US13324845Application Date: 2011-12-13
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Publication No.: US08687253B2Publication Date: 2014-04-01
- Inventor: Chung-Chieh Yu , Isao Matsubara , Mamoru Miyawaki
- Applicant: Chung-Chieh Yu , Isao Matsubara , Mamoru Miyawaki
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Main IPC: G03H1/26
- IPC: G03H1/26

Abstract:
A method and apparatus for reducing speckle noise in an image of an object are disclosed. The method includes, placing the object in an interferometer at a first position along a beam path of an object beam, irradiating the object with the object beam, moving the object from the first position to a second position by longitudinally shifting the object along the beam path of the object beam, irradiating the object with the object beam at the second position. At each of the first and second positions a holographic image formed by interference between the object beam and a reference beam is recorded. An object image with reduced speckle noise is obtained by averaging the holographic images. Either an arithmetic mean or a weighted average may be used in the averaging of the holographic images.
Public/Granted literature
- US20130148182A1 SPECKLE NOISE REDUCTION BASED ON LONGITUDINAL SHIFT OF SAMPLE Public/Granted day:2013-06-13
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